The EB-Series is a very highly-precise and highly performance manual probe station for wafer and substrates up to 300mm. It could be supporting many applications as C-V/I-V, RF, mm-Wave, sub-THz, Flexible Device, Vertical-Cavity Surface-Emitting Laser (VCSEL), Photo Diode and Photoluminescence measurement, wafer characterization test, Failure analysis (FA), Optoelectronic engineering, Photocommunication and etc. It could be supporting up to 16 probe positioners for DC measurement and 4 port for RF/mm-Wave measurment.
EB Series has nice stability system platform design with a vibration Isolation Table solution to provide contact high quality over measurement time to help you having accuracy test data. Sub-micron positioning, backlash-free and X-Y-Z linear movement of micropositioners enable precise probe placement.
Single-handed chuck adjustment, highly-planar chuck surface, 10 micron resolution, backlash-free and X-Y-Z linear movement, ensures ease of operation for both the novice and the expert user.
