Products
- 4” stainless steel chuck with vacuum switch separately
- For wafer 4” and less
- Side-driven stage X-Y travel 4”-4”
- 1 micron resolution Backlash free
- Chuck theta 15 degree backlash free
- Rectangular inner shaped platen with hard chrome plated
- Chuck up/down 4 mm
- 4” stainless steel chuck with vacuum switch separately
- For wafer 4” and less
- Side-driven stage X-Y travel 4”-4”
- 1 micron resolution Backlash free
- Chuck theta 15 degree backlash free
- Rectangular inner shaped platen with hard chrome plated
- Chuck up/down 4 mm
Dimension
- 500mmW x 450mmD x 550mmH with Microscope
- Weight 30 Kgs with microscope
Accessories
- Upgrade chuck stage to 6" x 6"
- Microscope stage XY stage 2"x2"
- RF probe/cable
- Digital camera
- Low current / capacitance probes
- High voltage probe
- Hot Chuck
- Vibration free table
- Shielding box
- 4” stainless steel chuck with vacuum switch separately
- For wafer 4” and less
- Side-driven stage X-Y travel 4”-4”
- 1 micron resolution Backlash free
- Chuck theta 15 degree backlash free
- Rectangular inner shaped platen with hard chrome plated
- Chuck up/down 4 mm
- Compact size
- Light weight
- Price affordable
- IVCV Measurement
- RF Probing east/west
- University lab. Suitable
- Ideal for small wafer less than 4”
- Side-Driven chuck stage
- Backlash-Free movement
- 500mmW x 450mmD x 550mmH with Microscope
- Weight 30 Kgs with microscope
